Virtual Inspection Systems with Multiple Modes

摘要

Methods and systems for determining one or more characteristics for defects detected on a specimen are provided. One system includes one or more computer subsystems configured for identifying a first defect that was detected on a specimen by an inspection system with a first mode but was not detected with one or more other modes. The computer subsystem(s) are also configured for acquiring, from the storage medium, one or more images generated with the one or more other modes at a location on the specimen corresponding to the first defect. In addition, the computer subsystem(s) are configured for determining one or more characteristics of the acquired one or more images and determining one or more characteristics of the first defect based on the one or more characteristics of the acquired one or more images.

主权项

1. A system configured to determine one or more characteristics for defects detected on a specimen, comprising:
a storage medium configured for storing images for a specimen generated by an inspection system, wherein the inspection system is configured for scanning energy over a physical version of the specimen while detecting energy from the specimen to thereby generate the images for the specimen and detect defects on the specimen based on the images, wherein the inspection system is further configured to perform the scanning and the detecting with multiple modes, and wherein the images stored by the storage medium comprise the images generated for locations on the specimen at which the defects were and were not detected by the inspection system; and one or more computer subsystems configured for:
identifying a first of the defects that was detected with a first of the multiple modes but was not detected with one or more other of the multiple modes;acquiring, from the storage medium, one or more of the images generated with the one or more other of the multiple modes at a location on the specimen corresponding to the first of the defects;determining one or more characteristics of the acquired one or more images; anddetermining one or more characteristics of the first of the defects based on the one or more characteristics of the acquired one or more images.