发明名称 METHOD OF CUTTING WORK AND WORK HOLDING JIG
摘要 PROBLEM TO BE SOLVED: To provide a method of cutting work and a holding jig capable of measuring an azimuth regardless of a restriction in a distance between a measuring portion of an azimuth measuring device and a measuring surface of work, and suppressing deterioration of rolling-back and breakage of the work when cutting the work.SOLUTION: A work holding jig 1 is composed of a work holding portion 2, and a clamp 3 capable of temporarily fixing a beam 6 and the work holding portion 2; and has a reference surface 4 capable of sliding the beam 6 to which work W is pasted without breaking a crystal axis azimuth of the work W on the work holding portion 2. A method of cutting the work W clips the beam 6 and the work holding 2 with the clamp 3 to temporarily fix and measures the crystal axis azimuth by using the work holding jig 1. After the measurement, the clamp 3 is removed to release the temporal fixing, and then the beam 6 is slid along the reference surface 4, thereby moving the work W to a center portion of the work holding jig 1. Then, the beam 6 is finally bonded to be fixed, and the work is set in a wire saw to be cut by adjusting a cutting cross-section azimuth.
申请公布号 JP2016013602(A) 申请公布日期 2016.01.28
申请号 JP20140137582 申请日期 2014.07.03
申请人 SHIN ETSU HANDOTAI CO LTD;NAGANO ELECTRONICS INDUSTRIAL CO LTD 发明人 KOZU HIROTOSHI;TAKANO HISAKAZU;SAITO MASAHITO
分类号 B24B27/06;B28D5/04;H01L21/304 主分类号 B24B27/06
代理机构 代理人
主权项
地址