NON-CONTACT MEASUREMENT APPARATUS AND METHOD

摘要

A non-contact method and apparatus for inspecting an object. At least one first image of the object on which an optical pattern is projected, taken from a first perspective is obtained. At least one second image of the object on which an optical pattern is projected, taken from a second perspective that is different to the first perspective is obtained. At least one common object feature in each of the at least one first and second images is then determined on the basis of an irregularity in the optical pattern as imaged in the at least one first and second images.