| 摘要 |
Disclosed is a roll-to-roll sputtering machine having a deflection prevention structure of a roll-to-roll unit. The disclosed roll-to-roll sputtering machine having the deflection prevention structure of the roll-to-roll unit comprises: a cylindrical housing which has a vacuum chamber, that is, a sputtering work space inside thereof; the roll-to-roll unit which supplies a film by a roll-to-roll method as being arranged on an entrance of the housing, collecting the film whose sputtering is completed; a door unit which inserts the roll-to-roll unit into the housing or withdraws the roll-to-roll unit from the housing as moving along a guide rail on a lower part by being installed in an end of the roll-to-roll unit; and a deflection prevention member to prevent a free stage of the roll-to-roll unit from being deflected. The deflection prevention member comprises: a fixing guide installed in both sides in the housing along a longitudinal direction; a connection guide slid along an external longitudinal direction of the fixing guide by the medium of an LM block, and has an outer part along the longitudinal direction connected to a front end of the roll-to-roll unit; and a flexible guide fixated and installed in both sides of the front end of the roll-to-roll unit, and is slid along the external longitudinal direction of the connection guide by the medium of the LM block. |
