| 摘要 |
The present invention relates to a flow controller for controlling an opening angle of a flow control valve. The flow controller comprises: a sensor part comprising a flow sensor for measuring the flow of a fluid flowing in the flow control valve and a temperature sensor for measuring the temperature of the fluid; and a control part comprising a flow correction unit which controls an opening angle of the flow control valve with a predetermined value, by performing feedback control of a flow value measured through the flow sensor, and compensates an error between the flow value measured through the flow sensor and a previously established flow value on the basis of the measured value measured through the sensor part, and controlling the opening angle of the flow control valve by reflecting a correction value of the flow correction unit to the flow value measured through the flow sensor. The flow controller can precisely perform flow control, by compensating flow difference of the fluid on the basis of characteristics of the fluid, such as temperature, viscosity and density. |
