发明名称 CUTTING DEVICE AND CUTTING METHOD
摘要 The present invention relates to a cutting device, capable of stably and individually fragmenting a product even when the product becomes small. In the present invention, an intermediate body (36) is formed by cutting a sealed substrate (12) along a first cutting line (32) by using a first cutting condition. Next, the intermediate body (36) is cut and individually fragmented by using a second cutting condition. Therefore, the intermediate body (36) is individually fragmented into a product (P) corresponding to areas (34) surrounded by a second cutting line (33) and the first cutting line (32). The flux of cutting water used for making the product (P) individually fragmented under the second cutting condition is lower than the flux of cutting water used for forming the intermediate body (36) under the first cutting condition. By having the flux of the cutting water in the second cutting condition low, the product (P) is prevented from deviating from a predetermined position of a cutting table (11) due to water pressure of the cutting water, even when the product (P) becomes small.
申请公布号 KR20160010309(A) 申请公布日期 2016.01.27
申请号 KR20150094522 申请日期 2015.07.02
申请人 TOWA CORPORATION 发明人 IZUMI YUYA;IMAI ICHIRO;ISHIBASHI KANJI
分类号 H01L21/78;H01L23/00 主分类号 H01L21/78
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