发明名称 POLISHING COMPOSITION, METHOD FOR PRODUCING POLISHING COMPOSITION, AND KIT FOR PREPARING POLISHING COMPOSITION
摘要 Provided are a polishing composition comprising a water-soluble polymer that has a molecular structure comprising a plurality of repeat unit species having different SP values and a polishing composition exhibiting an etching rate and an abrasive adsorption in prescribed ranges when determined by prescribed methods. Also provided is a method for producing a polishing composition, using an abrasive, a basic compound, a water-soluble polymer having an alkaline-hydrolytic functional group, and water. The method comprises a step of obtaining an agent A comprising at least the basic compound and a step of obtaining an agent B comprising at least the water-soluble polymer H.
申请公布号 EP2977423(A1) 申请公布日期 2016.01.27
申请号 EP20140767647 申请日期 2014.03.14
申请人 FUJIMI INCORPORATED 发明人 TSUCHIYA, KOHSUKE;TANSHO, HISANORI;ICHITSUBO, TAIKI
分类号 C09K3/14;B24B37/00;C09G1/02;H01L21/02;H01L21/304 主分类号 C09K3/14
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