Semiconductor materials, transistors including the same, and electronic devices including transistors

摘要

According to example embodiments, a semiconductor material may include zinc, nitrogen, and fluorine. The semiconductor material may further include oxygen. The semiconductor material may include a compound. For example, the semiconductor material may include zinc fluorooxynitride. The semiconductor material may include zinc oxynitride containing fluorine. The semiconductor material may include zinc fluoronitride. The semiconductor material may be applied as a channel material of a thin film transistor (TFT).

主权项

1. A compound semiconductor comprising:
zinc (Zn); nitrogen (N); and fluorine (F), wherein a composition ratio of fluorine (F) in the compound semiconductor with respect to materials except for zinc (Zn) is 3 at % or more.