Liquid-discharge-head substrate, method of manufacturing the same, and liquid discharge head

摘要

A method of manufacturing a liquid-discharge-head substrate is provided, which includes a plurality of elements for discharging liquid, and a heating member for heating the liquid-discharge-head substrate, the method including the steps of preparing a substrate having an insulating layer made of an insulating material provided on or above the substrate, providing a conductive layer made of a conductive material, and forming a conductive line being configured to supply current for driving the element and a part of a heating member by using the conductive layer.

主权项

1. A method of manufacturing a liquid-discharge-head substrate having a plurality of elements, the elements being configured to generate energy for discharging liquid and being arranged to form an element array, the method comprising the steps of:
preparing a substrate having a first heating line member, an insulating layer on or above the first heating line member and a conductive layer on or above the insulating layer, the insulating layer being made of an insulating material and the first heating line member and the conductive layer being made of a conductive material; and patterning the conductive layer to form a conductive line and a second heating line member, the conductive line being configured to supply current for driving the elements, the first and second heating line members being electrically separated from the conductive line and configured to generate heat for heating the liquid-discharge-head substrate, a longitudinal direction of the second heating line member extending along the conductive line and the element array, and a longitudinal direction of the first heating line member extending along a direction intersecting with the conductive line; wherein the first heating line member and the second heating line member are electrically connected through a through hole formed in the insulating layer, and wherein the second heating line member is longer than the first heating line member.