METHOD FOR FABRICATING VITREOUS CARBON MOLD WITH LOW SHAPE CHANGE AND FABIRCATED VITREOUS CARBON MOLD MANUFACTURED USING THE METHOD THEREOF

摘要

Provided is a technology for minimizing shape difference from a master substrate and a defect which are caused during a carbonization process when a microstructure and/or nanostructure amorphous carbon mold is manufactured by copying a thermosetting resin and using the carbonization process. According to an embodiment of the present invention, the method for manufacturing a vitreous carbon mold with reduced shape change includes the following steps of: producing a mixture of the liquid thermosetting resin with a first contraction ratio when the resin is carbonized, a curing agent, a solvent for adjusting viscosity, and first powder with a second contraction ratio smaller than the first contraction ratio; producing a polymer precursor in a state that a fine pattern formed on the master substrate is mixed with the mixture by using the master pattern on which the pre-designed fine pattern is formed; and carbonizing the polymer precursor.