发明名称 |
Image sensor device with light guiding structure |
摘要 |
An image sensor device and a manufacturing method for forming an image sensor device are provided. The image sensor device includes a semiconductor substrate having an array region and a periphery region. The image sensor device also includes a light sensing region in the array region of the semiconductor substrate. The image sensor device further includes a dielectric structure over the array region and the periphery region, and the dielectric structure has a substantially planar top surface. In addition, the image sensor device includes a recess in the dielectric structure and substantially aligned with the light sensing region. The image sensor device also includes a filter in the recess and a light blocking grid in the dielectric structure and surrounding a portion of the filter. |
申请公布号 |
US9247116(B2) |
申请公布日期 |
2016.01.26 |
申请号 |
US201414211636 |
申请日期 |
2014.03.14 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
Chien Volume;Chang Su-Hua;Huang Zen-Fong;Wei Chia-Yu;Jeng Chi-Cherng;Chen Hsin-Chi |
分类号 |
H04N3/14;H04N5/335;H04N9/04;H04N5/225;H01L31/062;H01L31/113 |
主分类号 |
H04N3/14 |
代理机构 |
Birch, Stewart, Kolasch & Birch, LLP |
代理人 |
Birch, Stewart, Kolasch & Birch, LLP |
主权项 |
1. An image sensor device, comprising:
a semiconductor substrate having an array region and a periphery region; a light sensing region in the array region of the semiconductor substrate; a dielectric structure over the array region and the periphery region, wherein the dielectric structure has a substantially planar top surface; a recess in the dielectric structure substantially aligned with the light sensing region; a filter in the recess; and a light blocking grid in the dielectric structure surrounding a portion of the filter, wherein a bottom of the recess is below a bottom of the light blocking grid. |
地址 |
Hsin-Chu TW |