发明名称 Image sensor device with light guiding structure
摘要 An image sensor device and a manufacturing method for forming an image sensor device are provided. The image sensor device includes a semiconductor substrate having an array region and a periphery region. The image sensor device also includes a light sensing region in the array region of the semiconductor substrate. The image sensor device further includes a dielectric structure over the array region and the periphery region, and the dielectric structure has a substantially planar top surface. In addition, the image sensor device includes a recess in the dielectric structure and substantially aligned with the light sensing region. The image sensor device also includes a filter in the recess and a light blocking grid in the dielectric structure and surrounding a portion of the filter.
申请公布号 US9247116(B2) 申请公布日期 2016.01.26
申请号 US201414211636 申请日期 2014.03.14
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 Chien Volume;Chang Su-Hua;Huang Zen-Fong;Wei Chia-Yu;Jeng Chi-Cherng;Chen Hsin-Chi
分类号 H04N3/14;H04N5/335;H04N9/04;H04N5/225;H01L31/062;H01L31/113 主分类号 H04N3/14
代理机构 Birch, Stewart, Kolasch & Birch, LLP 代理人 Birch, Stewart, Kolasch & Birch, LLP
主权项 1. An image sensor device, comprising: a semiconductor substrate having an array region and a periphery region; a light sensing region in the array region of the semiconductor substrate; a dielectric structure over the array region and the periphery region, wherein the dielectric structure has a substantially planar top surface; a recess in the dielectric structure substantially aligned with the light sensing region; a filter in the recess; and a light blocking grid in the dielectric structure surrounding a portion of the filter, wherein a bottom of the recess is below a bottom of the light blocking grid.
地址 Hsin-Chu TW