发明名称 Chemical and electrochemical synthesis and deposition of chalcogenides from room temperature ionic liquids
摘要 Room temperature electrochemical methods to deposit thin films of chalcogenide glasses.
申请公布号 US9242271(B2) 申请公布日期 2016.01.26
申请号 US201213622812 申请日期 2012.09.19
申请人 BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM 发明人 Stevenson Keith J.;Murugesan Sankaran;Keams Patrick;Akkineni Arunkumar
分类号 C25D3/56;B05D7/24;H01L21/02;C25D3/66;C25B1/00;C25D7/12 主分类号 C25D3/56
代理机构 Reed Smith LLP 代理人 Reed Smith LLP ;Riddle Robert R.;Gibson Matthew S.
主权项 1. A method for fabricating a germanium glass or film comprising: providing a solution comprising a room temperature ionic liquid, a germanium precursor, and a chalcogenide precursor, wherein the room temperature ionic liquid comprises PP13-TFSI, the germanium precursor comprises GeCl4, and the chalcogenide precursor comprises 1,4-butanedithiol; providing a substrate; and applying the solution onto the substrate by a deposition process.
地址 Austin TX US