发明名称 |
Chemical and electrochemical synthesis and deposition of chalcogenides from room temperature ionic liquids |
摘要 |
Room temperature electrochemical methods to deposit thin films of chalcogenide glasses. |
申请公布号 |
US9242271(B2) |
申请公布日期 |
2016.01.26 |
申请号 |
US201213622812 |
申请日期 |
2012.09.19 |
申请人 |
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM |
发明人 |
Stevenson Keith J.;Murugesan Sankaran;Keams Patrick;Akkineni Arunkumar |
分类号 |
C25D3/56;B05D7/24;H01L21/02;C25D3/66;C25B1/00;C25D7/12 |
主分类号 |
C25D3/56 |
代理机构 |
Reed Smith LLP |
代理人 |
Reed Smith LLP ;Riddle Robert R.;Gibson Matthew S. |
主权项 |
1. A method for fabricating a germanium glass or film comprising:
providing a solution comprising a room temperature ionic liquid, a germanium precursor, and a chalcogenide precursor, wherein the room temperature ionic liquid comprises PP13-TFSI, the germanium precursor comprises GeCl4, and the chalcogenide precursor comprises 1,4-butanedithiol; providing a substrate; and applying the solution onto the substrate by a deposition process. |
地址 |
Austin TX US |