Corrosion resistant electrodes for laser chambers

摘要

Corrosion resistant electrodes are formed of brass that has been doped with phosphorus. The electrodes are formed of brass that contains about 100 ppm to about 1,000 ppm of phosphorus, and the brass has no visible microporosity at a magnification of 400×. The brass may be cartridge brass that contains about 30 weight percent of zinc and the balance copper. Corrosion resistant electrodes also may be formed by subjecting brass to severe plastic deformation to increase the resistance of the brass to plasma corrosion. The corrosion resistant electrodes can be used in laser systems to generate laser light.

主权项

1. A laser system, comprising:
a chamber; a cathode disposed within the chamber, the cathode having an elongated cathode surface; and an anode disposed within the chamber, the anode having an elongated anode surface that faces the elongated cathode surface, a space between the elongated anode surface and the elongated cathode surface defining a discharge area within the chamber, the anode being formed of brass that contains about 100 ppm to about 1,000 ppm of phosphorus, wherein the brass has less than 30 inclusions per mm2 and each inclusion has a diameter that does not exceed about 5 microns, and the brass exhibits increased resistance to plasma corrosion relative to cartridge brass that has not been doped with phosphorus.