| 摘要 |
Systems and methods for producing energy neurons include a remote plasma generator to generate plasma in a plasma region. An ion extractor extracts high-energy ions from the plasma. A substrate support part is arranged in a processing chamber and supports a substrate. A neutron extractor and a gas dispersion device are arranged between a plasma region and a substrate support part. The neutron extractor and the gas dispersion device extract energy neutrons from the high-energy ions, supply the energy neutrons to the substrate, and disperse a precursor gas to a processing chamber. |
