| 摘要 |
PROBLEM TO BE SOLVED: To provide a tape expansion device capable of preventing a cover member from being sprung up by collision power of push-up means.SOLUTION: The tape expansion device is configured to break a film-like adhesive 21 that is bonded to a rear side of a wafer 11, along a predetermined dividing line in the state where the film-like adhesive 21 is bonded to an expand tape T mounted in an opening of an annular frame F. The tape expansion device includes: the push-up means for breaking the film-like adhesive by pushing up the expand tape; cold air supply means 42 for supplying cold air into a space where breaking is performed; a cover member 26 for preventing a portion of the film-like adhesive protruding from the wafer from being diffused in the case of breaking; and a movement suppression member 34 for preventing the cover member from separating from the film-like adhesive. The cover member is brought into contact with the film-like adhesive and presses the film-like adhesive with its dead weight, and the movement suppression member suppresses the movement of the cover member with air resistance. |
