DIAPHRAGM VALVE, FLUID CONTROL DEVICE, SEMICONDUCTOR MANUFACTURING DEVICE AND SEMICONDUCTOR MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a diaphragm valve capable of greatly improving durability of a diaphragm valve subjected to downsizing, a fluid control device including the diaphragm valve, a semiconductor manufacturing device including the fluid control device, and a semiconductor manufacturing method using the semiconductor manufacturing device.SOLUTION: A curvature radius (SR2) of a surface contacting to a diaphragm 5 of a diaphragm presser 6 is 30 mm or more. A taper angle (&thetas;) of the lower surface of a pressing adapter 8 is 10° or less to a flat part 14b on a bottom surface 14 of a recess part 2c of a body 2.