METAL-INSULATOR-METAL CAPACITOR, ELECTRONIC DEVICE INCLUDING THE SAME, AND METHOD OF FABRICATING THE SAME

摘要

A metal-insulator-metal (MIM) capacitor that includes an insulation pattern on an underlying structure having a capacitor region and a peripheral region surrounding the capacitor region, the insulation pattern having a plurality contact holes that expose portions of the underlying structure in the capacitor region; a lower metal pattern in the capacitor region to cover a top surface of the insulation pattern, sidewalls of the insulation pattern corresponding to sidewalls of the contact holes, and the portions of the underlying structure exposed by the contact holes; a dielectric pattern that covers the lower metal pattern in the capacitor region and a top surface of the insulation pattern in the peripheral region; and an upper metal pattern on the dielectric pattern in the capacitor region and the peripheral region.

主权项

1. A metal-insulator-metal (MIM) capacitor comprising:
an insulation pattern on an underlying structure having a capacitor region and a peripheral region surrounding the capacitor region, the insulation pattern having a plurality contact holes that expose portions of the underlying structure in the capacitor region; a lower metal pattern in the capacitor region to cover a top surface of the insulation pattern, sidewalls of the insulation pattern corresponding to sidewalks of the contact holes, and the portions of the underlying structure exposed by the contact holes; a dielectric pattern that covers the lower metal pattern in the capacitor region and a top surface of the insulation pattern in the peripheral region; and an upper metal pattern on the dielectric pattern in the capacitor region and the peripheral region.