| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor module capable of measuring gas pressure with a high degree of accuracy.SOLUTION: A sensor module 10, which outputs a change in temperature of an electric resistor generated according to gas pressure as a change in a resistance value of the electric resistor, comprises: a base substrate 11 where a recessed part 13 is formed; a floating film 20 that is provided on the base substrate 11 in the form of stepping over the recessed part 13; a heater 21 that is formed on a surface of the floating film 20 and uses a flowing current to heat the floating film 20; and a temperature sensor 22 that is the electric resistor formed on the surface of the floating film 20, allows a current less than the current of the heater 21 to flow and changes a voltage drop against the flowing current according to temperature of the floating film 20. |
