| 发明名称 |
Radiation Analyzer |
| 摘要 |
A radiation analyzer includes a primary ray source that generates primary rays, an optical system applies the primary rays emitted from the primary ray source to a sample, an energy-dispersive radiation detector that detects radiation that has been generated from the sample when the primary rays have been applied to the sample, and a support that supports the radiation detector so that the tilt of the center axis (C) of the radiation detector with respect to the optical axis (Z) of the optical system can be changed. |
| 申请公布号 |
US2016020067(A1) |
申请公布日期 |
2016.01.21 |
| 申请号 |
US201514799856 |
申请日期 |
2015.07.15 |
| 申请人 |
JEOL Ltd. |
发明人 |
Iwasawa Yorinobu |
| 分类号 |
H01J37/244;H01J37/22;H01J37/28 |
主分类号 |
H01J37/244 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A radiation analyzer comprising:
a primary ray source that generates primary rays; an optical system that applies the primary rays emitted from the primary ray source to a sample; an energy-dispersive radiation detector that detects radiation that has been generated from the sample when the primary rays have been applied to the sample; and a support that supports the radiation, detector so that a tilt of a center axis of the radiation detector with respect to an optical axis of the optical system can be changed. |
| 地址 |
Tokyo JP |
