发明名称 MANUFACTURING METHOD OF GLASS SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of a glass substrate that reduces thermal shrinkage dispersion in a single glass substrate.SOLUTION: A manufacturing method of a glass substrate includes a step S3 for putting on a stand a laminate of glass substrates formed by laminating the plurality of glass substrates in the thickness direction after sandwiching the plurality of glass substrates between sheets; and a heat treatment step S4 for heating the laminate from the outside in the in-plane direction of the glass substrate to reduce thermal shrinkage of the plurality of glass substrates. The heat hysteresis of a contact region to contact the stand, which is an outer peripheral surface, is adjusted to be equal to that of a non-contact region not to contact the stand.
申请公布号 JP2016011237(A) 申请公布日期 2016.01.21
申请号 JP20140134626 申请日期 2014.06.30
申请人 AVANSTRATE INC 发明人 OKAMOTO MISATO;TAKAHASHI YOSHINORI
分类号 C03B25/02;H01L21/683 主分类号 C03B25/02
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