DUAL SCARA ARM

摘要

A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.

主权项

1. A substrate transport apparatus comprising:
a drive section; a transport arm section connected to the drive section and being configured to transport substrates to a module, the transport arm section including a substantially rigid upper arm having a first upper arm section and a second upper arm section coupled to each other at a common axis of rotation by a releasable coupling to form the substantially rigid upper arm having opposite ends, a first forearm rotatably coupled to a first one of the opposite ends at a first elbow axis, a second forearm rotatable coupled to a second one of the opposite ends at a second elbow axis, and at least one end effector connected to each of the first forearm and the second forearm, each end effector being configured to hold at least one substrate; and wherein the releasable coupling is configured to change a distance between the common axis of rotation and at least one of the first elbow axis and the second elbow axis based on a predetermined characteristic of the module.