发明名称 POLISHING COMPOSITION
摘要 Provided is a polishing composition whereby polishing rate can be enhanced while good surface quality is realized. The present invention provides a polishing composition including silica particles as abrasive grains and a basic compound as a polishing accelerator. The ratio (A/B) of the total surface area A [m2/kg composition] of the abrasive grains included in 1 kg of the polishing composition with respect to the total volume B [m3/kg composition] of the abrasive grains included in 1 kg of the polishing composition is 7.0 × 107 or greater.
申请公布号 WO2016009629(A1) 申请公布日期 2016.01.21
申请号 WO2015JP03504 申请日期 2015.07.10
申请人 FUJIMI INCORPORATED 发明人 TAKAHASHI, SHUHEI;TOMATSU, MASATOSHI
分类号 C09K3/14;B24B37/00;H01L21/304 主分类号 C09K3/14
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