发明名称 |
POLISHING COMPOSITION |
摘要 |
Provided is a polishing composition whereby polishing rate can be enhanced while good surface quality is realized. The present invention provides a polishing composition including silica particles as abrasive grains and a basic compound as a polishing accelerator. The ratio (A/B) of the total surface area A [m2/kg composition] of the abrasive grains included in 1 kg of the polishing composition with respect to the total volume B [m3/kg composition] of the abrasive grains included in 1 kg of the polishing composition is 7.0 × 107 or greater. |
申请公布号 |
WO2016009629(A1) |
申请公布日期 |
2016.01.21 |
申请号 |
WO2015JP03504 |
申请日期 |
2015.07.10 |
申请人 |
FUJIMI INCORPORATED |
发明人 |
TAKAHASHI, SHUHEI;TOMATSU, MASATOSHI |
分类号 |
C09K3/14;B24B37/00;H01L21/304 |
主分类号 |
C09K3/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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