| 摘要 |
FIELD: physics, optics.SUBSTANCE: invention relates to scanning probe microscopes adapted for measurement of sample surface obtained after of mechanical modification of this surface. The microscope has a base (1), a scanner (33) mounted on a sample (40) movement mechanism (6), the sample (40) fixed on the scanner (33), the first clamp (27) with the probe (28) adapted for sounding of the sample (6), the control unit adapted for control of the scanner (33) and the probe (28), and the platform (18) with the first and the second guide on which a sliding carriage (26) is installed. On the base a punch (2) with the first drive (4) and the sample (40) movement mechanism (6) with the second drive (7) are installed. The platform (18) is fixed on the sample (40) movement mechanism (6). The first clamp (27) with the probe (28) are installed on the sliding carriage (26).EFFECT: minimising of error of measurement of sample surface.11 cl, 12 dwg |
