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摘要
申请公布号
JP5846023(B2)
申请公布日期
2016.01.20
申请号
JP20120088654
申请日期
2012.04.09
申请人
王子ホールディングス株式会社
发明人
田島 洋;山村 範雄;山本 敏三
分类号
H01L21/683;B05C3/18;B05C13/02;B65G49/06
主分类号
H01L21/683
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代理人
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