发明名称 SINTERED BODY COMPRISING LICOO2 SPUTTERING TARGET, AND PRODUCTION METHOD FOR SINTERED BODY COMPRISING LICOO2
摘要 Provided is a sintered body comprising LiCoO 2 used for a sputtering target. The area A of a surface of the sintered body that corresponds to a sputtering surface is 200 - 1500 cm 2 and the relative density of the entire sintered body is 75% or higher. When B1 represents the area of a region in which the area ratio that is occupied by pores is 10% or higher in the surface that corresponds to a sputtering surface, the ratio of B1 to the area A is 50% or higher, and the area B2 of a region having a specific resistance of 1.0 × 10 2 ©-cm or smaller in the surface that corresponds to a sputtering surface occupies 25% or more of the area A.
申请公布号 EP2975156(A1) 申请公布日期 2016.01.20
申请号 EP20140764991 申请日期 2014.03.12
申请人 KOBELCO RESEARCH INSTITUTE , INC. 发明人 TAKETOMI, YUICHI;KANAMARU, MORIYOSHI
分类号 C23C14/34;C04B35/00;C04B35/01;C04B35/645;C23C14/08;H01J37/34;H01M4/525 主分类号 C23C14/34
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