发明名称 |
SINTERED BODY COMPRISING LICOO2 SPUTTERING TARGET, AND PRODUCTION METHOD FOR SINTERED BODY COMPRISING LICOO2 |
摘要 |
Provided is a sintered body comprising LiCoO 2 used for a sputtering target. The area A of a surface of the sintered body that corresponds to a sputtering surface is 200 - 1500 cm 2 and the relative density of the entire sintered body is 75% or higher. When B1 represents the area of a region in which the area ratio that is occupied by pores is 10% or higher in the surface that corresponds to a sputtering surface, the ratio of B1 to the area A is 50% or higher, and the area B2 of a region having a specific resistance of 1.0 × 10 2 ©-cm or smaller in the surface that corresponds to a sputtering surface occupies 25% or more of the area A. |
申请公布号 |
EP2975156(A1) |
申请公布日期 |
2016.01.20 |
申请号 |
EP20140764991 |
申请日期 |
2014.03.12 |
申请人 |
KOBELCO RESEARCH INSTITUTE , INC. |
发明人 |
TAKETOMI, YUICHI;KANAMARU, MORIYOSHI |
分类号 |
C23C14/34;C04B35/00;C04B35/01;C04B35/645;C23C14/08;H01J37/34;H01M4/525 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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