AN ALIGNMENT PROCEDURE FOR TESTING THE SURFACE FIGURE PRECISION OF AN ASPHERIC REFLECTOR

摘要

The present invention relates to an optical alignment procedure to test a precision of a surface figure of an aspherical reflector and, more specifically, relates to an optical alignment procedure to test the precision of the surface figure of the aspherical reflector which improves precision of a measurement of an aspheric shape by aligning precisely an interferometer, a lens unit, and an aspherical reflector (300) in a planned location.