ANTI-REFLECTION NANO COATING STRUCTURE AND MANUFACTURING METHOD THEREOF

摘要

Provided are an anti-reflection nanocoating structure, and a manufacturing method thereof. The anti-reflection nanocoating structure comprises: a flat or curve substrate; a first coating layer arranged on the substrate, including a first oxide nanoparticle with a lower refractive index than that of the substrate; a second coating layer vertically arranged on the first coating layer, including tapered nanopillar composed of titanium dioxide nanoparticles; and a third coating layer arranged on an end of the nanopillar, including a second oxide nanoparticle with the lower reflective index than that of the substrate. The anti-reflection nanocoating structure has an anti-reflection property with a low angle dependence property of incident light. The anti-reflection nanocoating structure controls a ratio of reactive gas in a sputtering method, and forms a nanostructure vertically arranged on all surfaces of the substrate without being related to a curvature of the substrate.