| 摘要 |
According to an embodiment of the present invention, a substrate treating device comprises: a housing having a treatment space for treating a substrate provided therein and having an opening formed therein; a door assembly having a cover movable to an opening location, which opens the opening, and a blocking location, which blocks the opening; and a detection member configured to detect a sealing state between the housing and the cover. The detection member comprises: a connection pipe connected to the housing to communicate with the treatment space; and a measurement sensor configured to measure an internal state of the connection pipe. |
