| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and method of coating conductive DLC layer on an insulation base material, capable of coating the conductive DLC layer on the insulation base material and thereby forming a member having excellent corrosion resistance and conductivity, on which the conductive DLC layer having high conductivity is coated on the insulation base material.SOLUTION: An apparatus 100 of coating a conductive DLC layer 3 on an insulation base material according to the invention includes: a holding part 110 for holding the insulation base material; a first chamber 140 which performs coating of a conductive intermediate layer 2 on one surface 1a of the insulation base material held by the holding part; a voltage applying member 160 which comes in contact with a surface of the conductive intermediate layer and applies voltage to the conductive intermediate layer; and a second chamber 150 which performs coating of the conductive DLC layer on the conductive intermediate layer by sputtering in a state that the voltage applying member applies voltage to the conductive intermediate layer. |
