ELECTROMAGNETIC WAVE DETECTION ELEMENT AND SOLID-STATE IMAGING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electromagnetic wave detection element by which a high quantum efficiency and a high sensitivity are obtained, and that can operate an electric circuit arranged above an ionization chamber region with stability, and to provide a solid-state imaging device in which the electromagnetic wave detection element is arranged.SOLUTION: An electromagnetic wave detection element comprises: an ionization chamber region 12 consisting of an ntype semiconductor; a p type lower electrode contact layer 11 provided at a lower part of the ionization chamber region 12; an n type electric charge reading region 16 provided locally at a part of an upper part of the ionization chamber region 12; an n type electric charge collection region 13 provided so as to surround the electric charge reading region 16; a p type electric charge path guide region 14a provided so as to be contacted with the electric charge collection region 13; an insulating film 21 provided on the ionization chamber region 12; and an electric circuit 31a provided on the insulating film 21 and electrically connected with the electric charge reading region 16.