UNIT FOR CONVEYING SUBSTRATE AND APPARATUS FOR TREATING SUBSTRATE WITH THE UNIT AND SUBSTRATE CONVEYING METHOD

摘要

The present invention relates to a substrate handling apparatus. According to an embodiment of the present invention, the substrate handling device comprises: a housing having a handling space therein; a returning unit which returns a substrate to a first direction inside the housing; a plurality of returning shafts of which a longitudinal direction of each is provided in a second direction perpendicular to the first direction when viewed from a top, and comprising a handling fluid supply unit supplying a handling fluid to the substrate wherein the returning unit is arranged in the first direction; and a floating unit arranged between the returning shafts, adjusting a pressure of a bottom of the substrate returning by the returning shafts.