| 发明名称 |
DISTRIBUTED FEEDBACK LASER DIODE ARRAY AND METHOD OF MANUFACTURING SAME |
| 摘要 |
Provided is a method of manufacturing a distributed feedback laser diode array (DFB-LDA) including: forming active layers corresponding to a plurality of channels using electron beam lithography; forming a plurality of mask patterns between the active layers; and growing the active layers using electron beam lithography, wherein the opening widths of the plurality of mask patterns corresponding to the plurality of channels are different from one another. |
| 申请公布号 |
US2016013621(A1) |
申请公布日期 |
2016.01.14 |
| 申请号 |
US201514608385 |
申请日期 |
2015.01.29 |
| 申请人 |
Electronics and Telecommunications Research Institute |
发明人 |
LEEM Young Ahn;KIM Kisoo;KWON Oh Kee;Han Young-Tak |
| 分类号 |
H01S5/40;H01S5/12;H01S5/028;H01S5/343 |
主分类号 |
H01S5/40 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of manufacturing a distributed feedback laser diode array (DFB-LDA), the method comprising:
forming active layers corresponding to a plurality of channels using electron beam lithography; forming a plurality of mask patterns between the active layers; and growing the active layers using electron beam lithography, wherein the opening widths of the plurality of mask patterns corresponding to the plurality of channels are different from one another. |
| 地址 |
Daejeon KR |
