DRIVER LASER ARRANGEMENT, EUV RADIATION GENERATION APPARATUS AND METHOD FOR AMPLIFYING PULSED LASER RADIATION

摘要

The device relates to a driver laser arrangement (12) for an EUV radiation generation apparatus (1), comprising: a radiation source (2) for generating pulsed laser radiation (7) having a laser frequency (fL), and an amplifier arrangement (3) comprising at least one optical amplifier (4a-c) for amplifying pulsed laser radiation (7). The driver laser arrangement (12) is characterised by at least one frequency shift device (13a-c) for generating a frequency shift of the laser frequency (fL) of the laser radiation (7) relative to a maximum frequency of a frequency-dependent amplification of the at least one optical amplifier (4a-c), and a control device (14), which is designed to set the frequency shift (∆f) such that the amplification (VRED) of the optical amplifier (4a-c) for the laser radiation (7) is reduced to less than 90 %, preferably to less than 70 %, especially preferably to less than 50 % of a maximum amplification (VMAX) of the optical amplifier (4a-c). The invention also relates to an associated method and a computer program product.