The present invention comprises: a workpiece holding and transporting part (2); a first marking unit (3A); a second marking unit (3B); a pre-marking-pattern imaging unit (4) that captures an image of a of a first pre-marking pattern (PM1) that is marked using the first marking unit (3A) upon a first pre-marking area (PR1) that is set on a marking target object and of a second pre-marking pattern (PM2) that is marked using the second marking unit (3B) upon a second pre-marking area (PR2) that is set on the marking target object; a pre-marking position detecting part (5) that detects the marking position of the first pre-marking pattern (PM1) and the second pre-marking pattern (PM2); a pre-marking reference position registration part (6); a first marking position deviation correction part (7A); and a second marking position deviation correction part (7B). As a result, even if the processing range that is set for an object to be processed is large, the present invention is capable of performing high-resolution patterning in a short period of time and prevents the occurrence of positioning deviations and poor overlap.
