| 摘要 |
Provided is an insulating material target whereby electrical discharge can be prevented from occurring in a gap between a shield and a target when attached to a sputtering device and AC power is supplied. This insulating material target (2) for sputtering devices has a shield (5) around the circumference thereof, when attached to a sputtering device (SM) for the insulating material target (2), and comprises; a plate-shaped target material (21) surrounded by the shield; and an annular support material (22) having an extending section (22a) that has one surface of the target material as a sputter surface (2a) thereof that is sputtered, said extending section being joined to an outer rim section of the other surface of the target material, extending outwards from the circumferential surface of the target material, and having a prescribed gap from the shield. The support material is configured so as to have at least the same impedance as the impedance of the target material, when AC power is supplied to the insulating material target and the sputter surface is sputtered. |
