摘要 |
<p><P>PROBLEM TO BE SOLVED: To adjust the temperature of a high frequency generation device, installed in an excessive vibration environment, appropriately and to reduce a vibration acting on the high frequency generation device. <P>SOLUTION: The high frequency generation device includes a hollow member 60 composed of a flexible material and provided around the body 31 of a magnetron 30, an inlet 70 through which cooling water(heat transfer medium) is introduced into the hollow part 61 of the hollow member 60, and an outlet 80 through which the cooling water is discharged from the hollow part 61 of the hollow member 60. The hollow member 60 performs heat exchange between the cooling water introduced into the hollow part 61 of the hollow member 60 from the inlet 70 and the body 31 of the magnetron 30. Meanwhile, the hollow member 60 deforms elastically for a vibration working on the magnetron 30, and holds the magnetron 30 so as to be able to absorb the vibration. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |