| 摘要 |
PURPOSE:To obtain a stable light receiving body of high quality by laminating two a-Si layers contg. O, C or N on a support having a large number of hemispherical dents and by distributing Ge or Sn in the lower layer. CONSTITUTION:Rigid spheres are naturally dropped on the surface of a metallic support 101 to make the surface uneven by the traces of the spheres having >=0.035 ratio of D/R (D is <500mum width and R is curvature). Two a-Si layers 102', 102'' contg. O, C or N are laminated on the support 101 and Ge or Sn is distributed only in the layer 102' so that the concn. is made higher on the support side. When the concn. of Ge or Sn in the layer 102' is made extremely high, light having longer wavelengths and passing through the layer 102'' can perfectly be absorbed in the layer 102'. When the concn. is regulated to 1X10<2>-5X10<3>atom ppm and the thickness (t) of the layer 102' is selected so as to satisfy <=0.4 ratio of t/T (T is the total thickness of the light receiving layers), a layer inhibiting the implantation of electric charges is formed. A barrier layer of an insulator may be formed in place of the inhibiting layer or both the layers may be formed. By this structure, a light receiving body generating no interference fringes and giving stably and repeatedly high quality images is obtd. |
