Method for producing a thin coating on a substrate

摘要

The method involves coupling a substrate (2) with a front team device such that the substrate is isotropic stretched with the team device. The substrate is held resilient with a predetermined bias. A thin layer material is separated on the substrate under action of heat so that a thin layer with the thin layer material is formed on the substrate. The substrate is decoupled from team device. The thin layer accompanied by the shrinkage is cooled. The predetermined bias is set high to prevent appearance of tensile stress in the thin layer accompanied by the shrinkage.