多層ナノ構造フィルム

摘要

Processes for forming films comprising multiple layers of nanostructured support elements are described. A first layer of nanostructured support elements is formed by depositing a base material on a substrate and annealing. Further growth of the first layer of nanostructures is then inhibited. Additional layers of nanostructured support elements may be grown on the first layer of nanostructures through additional deposition and annealing steps. The multilayer films provide increased surface area and are particularly useful in devices where catalyst activity is related to the surface area available to support catalyst particles.