Probe apparatus

摘要

The present invention generally relates to methods and apparatuses for ensuring the integrity of probe card assemblies, verifying that probe cards are ready for testing, and allowing analysis of probe card performance characteristics. In one embodiment, an apparatus allows rework of a probe card at an angle from a front position of the apparatus.

主权项

1. A probe card analyzer apparatus, comprising:
a table body; a first support arm extending away from a first corner of the table body; a second support arm extending away from a second corner of the table body, the second support arm extending substantially parallel to the first support arm; a first track coupled to the first support arm; a second track coupled to the second support arm; a first sample table arm coupled to the first track and movable along the first track; a second sample table arm coupled to the second track and movable along the second track, the second sample table arm substantially parallel to the first sample table arm; a sample table rotatably coupled to the first sample table arm and the second sample table arm such that the sample table is rotatable about an axis.