| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a mask for a CVD, which can maintain dimensional accuracy of an opening of the mask in forming a thin film by the CVD method and suitable to shorten a thickness-rise distance of a layer to be formed, and a manufacturing method of a display panel.SOLUTION: A mask 3 comprises : a support frame 10 which is made of ceramic and has a frame-shape; multiple metal plates 20a-20j mounted on the support frame 10; and a ceramic cover 30 covering over the metal plates 20a-20j. The multiple metal plates 20a-20j are annularly arranged on an X-Y plane in a state where adjacent protrusion parts 23a-23j are arranged in such a state that a predetermined gap 26 is provided therebetween. The multiple protrusion parts 23a-23j arranged annularly form an opening part 51 on an external edge. Namely, inside of the multiple protrusion parts 23a-23j annularly arranged provides the opening part 51. |
