发明名称 CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To attach a cutting blade stably to a flange, regardless of the thickness of the cutting blade.SOLUTION: In a cutting device (1) where the tip (32) of a rotary spindle (31) is projected from the spindle housing (21), and a cutting blade 1(15) is attached to the tip (32) of the rotary spindle via a flange (35), an air seal is formed at the tip (22) of the spindle housing by allowing high pressure air to flow out from the gap (29) between the spindle housing and rotary spindle, and a groove (44) having a substantially arcuate cross-section is formed annularly around the center of rotation (C) of the flange, on the back (43) of the flange, so that the high pressure air flowed out from the gap between the spindle housing and rotary spindle is directed toward the spindle housing side.
申请公布号 JP2016004811(A) 申请公布日期 2016.01.12
申请号 JP20140122323 申请日期 2014.06.13
申请人 DISCO ABRASIVE SYST LTD 发明人 NAKANISHI YUJI
分类号 H01L21/301;B23Q11/00;B24B27/06;F16C32/06;F16C33/74 主分类号 H01L21/301
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