发明名称 METHOD OF MANUFACTURING ORGANIC EL DISPLAY DEVICE, AND ORGANIC EL DISPLAY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing an organic EL display device, which performs film formation by vapor deposition with higher accuracy.SOLUTION: The method of manufacturing an organic EL display device comprises: a measurement electrode forming step of forming a pair of measurement electrodes 50 made of a conductive material outside a display region on a substrate 20 made of an insulating material; and a film forming step of measuring the film thickness of a thin film 60 formed by vapor deposition, on the basis of an electric physical quantity measured between the pair of measurement electrodes 50, and forming the thin film 60.
申请公布号 JP2016004682(A) 申请公布日期 2016.01.12
申请号 JP20140124208 申请日期 2014.06.17
申请人 JAPAN DISPLAY INC 发明人 ONO KEISUKE;SATO TOSHIHIRO
分类号 H05B33/10;H01L51/50;H05B33/04 主分类号 H05B33/10
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