发明名称 |
METHOD OF MANUFACTURING ORGANIC EL DISPLAY DEVICE, AND ORGANIC EL DISPLAY DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an organic EL display device, which performs film formation by vapor deposition with higher accuracy.SOLUTION: The method of manufacturing an organic EL display device comprises: a measurement electrode forming step of forming a pair of measurement electrodes 50 made of a conductive material outside a display region on a substrate 20 made of an insulating material; and a film forming step of measuring the film thickness of a thin film 60 formed by vapor deposition, on the basis of an electric physical quantity measured between the pair of measurement electrodes 50, and forming the thin film 60. |
申请公布号 |
JP2016004682(A) |
申请公布日期 |
2016.01.12 |
申请号 |
JP20140124208 |
申请日期 |
2014.06.17 |
申请人 |
JAPAN DISPLAY INC |
发明人 |
ONO KEISUKE;SATO TOSHIHIRO |
分类号 |
H05B33/10;H01L51/50;H05B33/04 |
主分类号 |
H05B33/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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