METHOD OF GENERATING SUPPLY PATTERN DATA OF IMPRINT MATERIAL, IMPRINT METHOD, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

摘要

According to the present invention, provided is a method for generating supply pattern data of an imprint material formed by using a mold. The method comprises the following step of: obtaining information on a shape change in a pattern portion of the mold caused by cleaning the pattern portion of the mold, for each of a plurality of different cleaning methods; and generating supply pattern data corresponding to the number of cleaning operations, based on the obtained information about the shape change corresponding to a cleaning method.