| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for applying coating onto an inner surface enclosing a passage so that a dynamic friction coefficient between the inner surface enclosing the passage for an article and the article in contact with the inner surface is reduced.SOLUTION: Plasma is generated from process gas inside a passage for an article, and coating is deposited on an inner surface by the plasma. The article may be arranged inside the passage of a conductive conduit, as the need arises. The article or the conductive conduit is bonded to a high-frequency generator, and plasma is generated inside the passage for the article. |
