发明名称 Method for producing group III nitride single crystal
摘要 A method for producing a group III nitride single crystal (ingot) includes providing a seed crystal comprising a first crystal face that is perpendicular to a growth direction of the single crystal and has a first predetermined area, and a second crystal face that is inclined to the growth direction and has a second predetermined area and growing the group III nitride single crystal on the first crystal face and the second crystal face by controlling a growth condition of the single crystal so as not to change the first predetermined area and the second predetermined area. A method for producing a group III nitride single crystal substrate includes further cutting the group III nitride single crystal substrate off from the grown group III nitride single crystal (ingot).
申请公布号 US9234299(B2) 申请公布日期 2016.01.12
申请号 US200712003231 申请日期 2007.12.20
申请人 SCIOCS COMPANY LIMITED 发明人 Yoshida Takehiro
分类号 C30B25/02;C30B29/40;C30B25/18 主分类号 C30B25/02
代理机构 McGinn IP Law Group, PLLC 代理人 McGinn IP Law Group, PLLC
主权项 1. A method for producing a group III nitride single crystal, the method comprising: providing a seed crystal comprising a first crystal face that is perpendicular to a growth direction of the single crystal and has a first predetermined area, and a second crystal face that is inclined to the growth direction and has a second predetermined area; and growing the group III nitride single crystal on the first crystal face and the second crystal face by vapor phase growth and by controlling a growth condition of the single crystal so as not to change the first predetermined area and the second predetermined area.
地址 Hitachi-Shi, Ibaraki-Ken JP