发明名称 |
Method for producing group III nitride single crystal |
摘要 |
A method for producing a group III nitride single crystal (ingot) includes providing a seed crystal comprising a first crystal face that is perpendicular to a growth direction of the single crystal and has a first predetermined area, and a second crystal face that is inclined to the growth direction and has a second predetermined area and growing the group III nitride single crystal on the first crystal face and the second crystal face by controlling a growth condition of the single crystal so as not to change the first predetermined area and the second predetermined area. A method for producing a group III nitride single crystal substrate includes further cutting the group III nitride single crystal substrate off from the grown group III nitride single crystal (ingot). |
申请公布号 |
US9234299(B2) |
申请公布日期 |
2016.01.12 |
申请号 |
US200712003231 |
申请日期 |
2007.12.20 |
申请人 |
SCIOCS COMPANY LIMITED |
发明人 |
Yoshida Takehiro |
分类号 |
C30B25/02;C30B29/40;C30B25/18 |
主分类号 |
C30B25/02 |
代理机构 |
McGinn IP Law Group, PLLC |
代理人 |
McGinn IP Law Group, PLLC |
主权项 |
1. A method for producing a group III nitride single crystal, the method comprising:
providing a seed crystal comprising a first crystal face that is perpendicular to a growth direction of the single crystal and has a first predetermined area, and a second crystal face that is inclined to the growth direction and has a second predetermined area; and growing the group III nitride single crystal on the first crystal face and the second crystal face by vapor phase growth and by controlling a growth condition of the single crystal so as not to change the first predetermined area and the second predetermined area. |
地址 |
Hitachi-Shi, Ibaraki-Ken JP |