| 发明名称 | Micro-electro-mechanical system (MEMS) structures and design structures | ||
| 摘要 | Dummy Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are disclosed. The method includes forming a bumper extending from a Micro-Electro-Mechanical System (MEMS) beam structure provided within a cavity structure. The method further includes forming a dummy landing structure on an opposing side of the cavity structure from the MEMS beam, which is laterally offset from the bumper when the MEMS beam is in a non-actuated state. | ||
| 申请公布号 | US9233832(B2) | 申请公布日期 | 2016.01.12 |
| 申请号 | US201313891294 | 申请日期 | 2013.05.10 |
| 申请人 | GLOBALFOUNDRIES INC. | 发明人 | Stamper Anthony K. |
| 分类号 | H01H57/00;H02N1/00;H05K13/00;H01H51/22;H01G7/00;B81B3/00 | 主分类号 | H01H57/00 |
| 代理机构 | Roberts Mlotkowski Safran & Cole, P.C. | 代理人 | Canale Anthony;Calderon Andrew M.;Roberts Mlotkowski Safran & Cole, P.C. |
| 主权项 | 1. A method, comprising: forming a bumper extending from a Micro-Electro-Mechanical System (MEMS) beam structure provided within a cavity structure; and forming a dummy landing structure on an opposing side of the cavity structure from the MEMS beam, which is laterally offset in a horizontal direction from the bumper when the MEMS beam is in a non-actuated state and which the bumper lands on when the MEMS beam is in an actuated state. | ||
| 地址 | Grand Cayman KY | ||