| 摘要 |
The present invention discloses a vacuum control system and a method thereof. The vacuum control system comprises: a valve driving module which adjusts the pressure in a chamber by varying an opening/closing angle of a valve on the basis of a valve control signal including a preset pressure set value, and measures a pressure measurement value in the chamber; and a valve driving controller which calculates a pressure correction value on the basis of a proportional integral derivative (PID) gain and an error between the pressure set value and the measured pressure measurement value, and feeds back the calculated pressure correction value to the valve control signal to control the valve driving module according to the fed-back valve control signal. |
