| 发明名称 |
HIGH PURITY ALUMINUM TOP COAT ON SUBSTRATE |
| 摘要 |
To manufacture a chamber component for a processing chamber, an aluminum coating is formed on an article comprising impurities, the aluminum coating being substantially free from impurities. |
| 申请公布号 |
US2016002811(A1) |
申请公布日期 |
2016.01.07 |
| 申请号 |
US201414762151 |
申请日期 |
2014.03.03 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
SUN Jennifer Y.;BANDA Sumanth |
| 分类号 |
C25D11/04;C25D3/54;C25D5/48 |
主分类号 |
C25D11/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of manufacturing a chamber component for a processing chamber comprising:
forming an aluminum coating on an article comprising impurities, the aluminum coating being substantially free from impurities. |
| 地址 |
Santa Clara CA US |
