| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for assaying point resolution of a TEM device by acquiring an atomic column separation image of a sample having atomic columns close to each other even when resolution performance of the TEM device less than 0.1 nm is not obtained in a separation structure of an electron wave directly below the sample due to sample influence in a transmission electron microscope.SOLUTION: A method for assaying the resolution of a transmission electron microscope is characterized in that the already-known crystal thin film is used for an evaluation sample at an atomic interval, atomic column images close to each other of the evaluation sample are acquired by the transmission electron microscope, the images transformed from the atomic-column images close to each other are obtained by applying the two-dimensional Laplace operator to the obtained atomic column images close to each other, it is determined whether or not the images transformed for the atomic-column images close to each other are separated from each other, and when separation is determined, the transmission electron microscope is assayed to have the resolution equivalent to the already-known atomic interval. |
